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Micro-Processing Research Facility

The Micro-Processing Research Facility (MPRF) provides researchers the ability to conduct micro-processing fabrication processes. Services include optical lithography, thin film deposition, capacitively coupled reactive ion etching, and silicon-based plasma enhanced chemical vapor deposition processes. This equipment is housed in a class 100 clean room with all necessary facilities and supporting process equipment. In combination with other JIAM facilities, the MPRF provides researchers with the means to conduct cutting-edge investigations in materials science and engineering.


AJA Magnetron Sputtering System
Unaxis RIE
Karl Suss Contact Printer

General Equipment

Plasmatherm PECVD



Zeiss Microscope

FORMS

OTHER INFORMATION

CONTACT

Dr. Eric Lukosi, Director
865-974-6568
MPRF@utk.edu

Existing users may book time via Stratocore.