The Micro-Processing Research Facility (MPRF) provides researchers the ability to conduct micro-processing fabrication processes. Services include optical lithography, thin film deposition, capacitively coupled reactive ion etching, and silicon-based plasma enhanced chemical vapor deposition processes. This equipment is housed in a class 100 clean room with all necessary facilities and supporting process equipment. In combination with other JIAM facilities, the MPRF provides researchers with the means to conduct cutting-edge investigations in materials science and engineering.
AJA Magnetron Sputtering System
|Unaxis RIE||Karl Suss Contact Printer|
Existing users may book time via Stratocore.