The University of Tennessee, Knoxville

Joint Institute for Advanced Materials


Unaxis RIE

Unaxis RIE

The Unaxis Shuttelock SLR-760-RIE system is designed to etch various forms of silicon containing compounds using fluorine chemistry. Further, oxygen-based etching processes are also available. The system can process up to eight inch wafers.


 

Contribute to a big idea. Give to JIAM.

The University of Tennessee, Knoxville. Big Orange. Big Ideas.

Knoxville, Tennessee 37996 | 865-974-1000
The flagship campus of the University of Tennessee System