The University of Tennessee, Knoxville

Joint Institute for Advanced Materials

Karl Suss Contact Printer

Karl Suss Contact Printer

The Karl Suss MA6 optical lithography system is configured to process four inch or smaller wafers. The system utilizes a mercury lamp, but is ideal for I-line resist processes. This system can be used for both positive and negative patterning processes in-combination with other equipment within the MPRF to create advanced structures as required by the user.

MA6 Contact Printer Quick Start Guide


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