The University of Tennessee, Knoxville

Joint Institute for Advanced Materials

JIAM Micro-Processing Research Facility

The Micro-Processing Research Facility (MPRF) provides researchers the ability to conduct micro-processing fabrication processes. Services include optical lithography, thin film deposition, capacitively coupled reactive ion etching, and silicon-based plasma enhanced chemical vapor deposition processes. This equipment is housed in a class 100 clean room with all necessary facilities and supporting process equipment. In combination with other JIAM facilities, the MPRF provides researchers with the means to conduct cutting-edge investigations in materials science and engineering.


Other Information


Dr. Eric Lukosi, Director



Contribute to a big idea. Give to JIAM.

The University of Tennessee, Knoxville. Big Orange. Big Ideas.

Knoxville, Tennessee 37996 | 865-974-1000
The flagship campus of the University of Tennessee System