The University of Tennessee, Knoxville

Joint Institute for Advanced Materials


JIAM Micro-Processing Research Facility

The Micro-Processing Research Facility (MPRF) provides researchers the ability to conduct micro-processing fabrication processes. Services include optical lithography, thin film deposition, capacitively coupled reactive ion etching, and silicon-based plasma enhanced chemical vapor deposition processes. This equipment is housed in a class 100 clean room with all necessary facilities and supporting process equipment. In combination with other JIAM facilities, the MPRF provides researchers with the means to conduct cutting-edge investigations in materials science and engineering.




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Other Information


Contact

Dr. Eric Lukosi, Director
865-974-6568
MPRF@utk.edu

 


 

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