The University of Tennessee, Knoxville

Joint Institute for Advanced Materials

AJA Magnetron Sputtering System


The AJA International ATC Orion-5 confocal magnetron sputtering system at JIAM has the ability to sputter thin films of both dielectrics and metals. Three materials can be deposited in one process using either DC or RF biasing. RF substrate biasing is available along with substrate heating up to 850 °K.

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